1.

Conference Proceedings

Conference Proceedings
Wei,J. ; Kawarada,H. ; Hiraki,A.
Pub. info.: Plasma properties, deposition and etching.  pp.465-476,  1993.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 140-142
2.

Conference Proceedings

Conference Proceedings
Kawazu,Z. ; Kawakami,Y. ; Taguchi,T. ; Hiraki,A.
Pub. info.: Proceedings of the 15th International Conference on Defects in Semiconductors : Budapest, Hungary, August 22-26, 1988.  Part2  pp.555-560,  1989.  Aederlmannsdorf, Switzwelns.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 38-41