Whittaker, A. K. ; Blakey, I. ; Liu, H. ; Hill, D. J. T. ; George, G. A. ; Conley, W. ; Zimmerman, P.
Pub. info.:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.214-221, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering