1.

Conference Proceedings
Conference Proceedings
1. Mix-and-match overlay method by compensating dynamic scan distortion error
Kono, T. ; Takakuwa, M. ; Asanuma, K. ; Komine, N. ; Higashiki, T.
Pub. info.: Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA.  pp.221-227,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5378
2.

Conference Proceedings
Conference Proceedings
2. A cost model comparing image qualification and direct mask inspection [6349-139]
Bhattacharyya, K. ; Hazari, V. ; Sutherland, D. ; Higashiki, T.
Pub. info.: Photomask Technology 2006.  pp.63493N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
3.

Conference Proceedings
Conference Proceedings
3. Basic studies of overlay performance on immersion lithography tool [6154-26]
Shiraishi, K. ; Fujiwara, T. ; Tanizaki, H. ; Ishii, Y. ; Kono, T. ; Nakagawa, S. ; Higashiki, T.
Pub. info.: Optical Microlithography XIX.  pp.61540Q-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
4.

Conference Proceedings
Conference Proceedings
4. Impact of across-pupil transmittance variation in projection lenses on fine device pattern imaging
Sato, K. ; Mimotogi, S. ; Inoue, S. ; Higashiki, T.
Pub. info.: Optical Microlithography XVI.  Part One  pp.33-44,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
5.

Conference Proceedings
Conference Proceedings
5. TTR (through the reticle) alignment system with photoresist ablation technique
Tanaka, R. ; Kobayashi, M. ; Yasuda, M. ; Magome, N. ; Ishigo, K. ; Ikegami, H. ; Higashiki, T.
Pub. info.: Optical Microlithography XVII.  pp.1828-1835,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
6.

Conference Proceedings
Conference Proceedings
6. A new process for accurate alignment using laser ablation technology
Ikegami, H. ; Kawano, K. ; Ishigo, K. ; Higashiki, T. ; Hayasaka, N. ; Yoshitaka, N. ; Kashiwagi, H. ; Kobayashi, M. ; Ogawa, Y. ; Ito, S.
Pub. info.: Optical Microlithography XVII.  pp.960-967,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
7.

Conference Proceedings
Conference Proceedings
7. Alignment mark signal simulation system for the optimum mark feature selection
Sato, T. ; Endo, A. ; Higashiki, T. ; Ishigo, K. ; Kono, T. ; Sakamoto, T. ; Shioyama, Y. ; Tanaka, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.105-113,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
8.

Conference Proceedings
Conference Proceedings
8. Method of robust pattern design for lens aberration
Komine, N. ; Konomi, K. ; Asanuma, K. ; Tawarayama, K. ; Higashiki, T.
Pub. info.: Optical Microlithography XVII.  pp.1952-1959,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377