1.

Conference Proceedings
Conference Proceedings
1. Si3N4 PARTICLE REMOVAL EFFICIENCY STUDIES
Liu, J.Q. ; Lee, C. ; Rosamilia, J.M. ; Boone, T. ; Higashi, G.S.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.552-559,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. The Influence of HF, 0H, and Dissolved 02 on Silicon Surface Chemical Cleaning
Higashi, G.S. ; Chabal, Y.J. ; Raghavachari, K. ; Becker, R.S. ; Green, M.P. ; Hanson, K. ; Boone, T. ; Eisenberg, J.H. ; Shive, S.F. ; DiBello, G.N. ; Fulford, K.L.
Pub. info.: Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993.  pp.189-198,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-13
3.

Conference Proceedings
Conference Proceedings
3. INFRARED SPECTROSCOPY OF Si (111) AND Si (100) SURFACES AFTER HF TREATMENT: HYDROGEN TERMINATION AND SURFACE MORPHOLOGY
Chabal, Y.J. ; Higashi, G.S. ; Raghavachari, K.
Pub. info.: Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.191-196,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 131
4.

Conference Proceedings
Conference Proceedings
4. *SURFACE PHOTOCHEMICALLY ACTIVATED CHEMICAL VAPOR DEPOSITION OF PATTERNED ALUMINUM THIN FILMS
Higashi, G.S. ; Blonder, G.E. ; Fleming, C.G.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.117-128,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
5.

Conference Proceedings
Conference Proceedings
5. AFM Characterization of Semiconductor Materials and Devices
Hanson, K.J. ; Sapjeta, J. ; Higashi, G.S.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.355-369,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33
6.

Conference Proceedings
Conference Proceedings
6. Laser Anneal Technology for Enhancement of Poly-Silicon Dopant Activation
Ma, Y. ; Ahmed, K.Z. ; Cunningham, K.L. ; Olsen, C.S. ; Leung, T.Y.B. ; Mcintosh, R.C. ; Mayur, A.J. ; Liang, H. ; Yam, M. ; Castle, M. ; Muthukrishnan, S. ; Liu, P.M. ; Foad, M. ; Miner, G.E. ; Higashi, G.S.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.230-235,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
7.

Conference Proceedings
Conference Proceedings
7. DETECTION OF PROCESS INDUCED DISLOCATIONS IN SILICON
Benton, J.L. ; Higashi, G.S. ; Boone, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1117-1122,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
8.

Conference Proceedings
Conference Proceedings
8. 6 Cleaning Technology in Semiconductor Device Manufacturing: Approaches to Environmentally Responsible Processing
Rosamillia, J.M. ; Boone, T. ; Higashi, G.S.
Pub. info.: Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: applications in electronics.  pp.68-82,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-21