1.

Conference Proceedings
Conference Proceedings
1. Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)
Walraven,J.A. ; Cole Jr.,E.I. ; Sloan,L.R. ; Hietala,S.L. ; Tigges,C.P. ; Dyck,C.W.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.254-259,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings
Conference Proceedings
2. Integrated chemiresistor array for small sensor platforms
Hughes,R.C. ; Casalnuovo,S.A. ; Wessendorf,K.O. ; Savignon,D.J. ; Hietala,S.L. ; Patel,S.V. ; Heller,E.J.
Pub. info.: Detection and remediation technologies for mines and minelike targets V : 24-28 April 2000, Orlando, USA.  Part1  pp.519-529,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4038
3.

Conference Proceedings
Conference Proceedings
3. Acoustic-wave chemical microsensors in GaAs
Casalnuovo,S.A. ; Heller,E.J. ; Hietala,S.L. ; Baca,A.G. ; ottenstette,R.J. ; Reno,J.L. ; Frye-Mason,G.C.
Pub. info.: Micromachined Devices and Components IV.  pp.103-110,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514