Liebmann, L. ; Mansfield, S. ; Han, G. ; Culp, J. ; Hibbeler, J. ; Tsai, R.
Pub. info.:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560K-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Liebmann, L. ; Maynard, D. ; McCullen, K. ; Seong, N. ; Buturla, E. ; Lavin, M. ; Hibbeler, J.
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Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.1-12, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering