1.

Conference Proceedings

Conference Proceedings
Liebmann, L. ; Mansfield, S. ; Han, G. ; Culp, J. ; Hibbeler, J. ; Tsai, R.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings

Conference Proceedings
Liebmann, L. ; Maynard, D. ; McCullen, K. ; Seong, N. ; Buturla, E. ; Lavin, M. ; Hibbeler, J.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.1-12,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756