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Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ottermann, C. R. ; Kuschnereit, R. ; Anderson, O. ; Hess, P. ; Bange, K.
Pub. info.:
Thin films, stresses and mechanical properties VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.251-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
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