1.

Conference Proceedings
Conference Proceedings
1. Recent developments in spectroscopic ellipsometry for in-situ applications
Johs,B.D. ; Hale,J. ; Ianno,N.J. ; Herzinger,C.M. ; Tiwald,T.E. ; Woollam,J.A.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA.  pp.41-57,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4449
2.

Conference Proceedings
Conference Proceedings
2. Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-？-nitride semiconductor device heterostructures
Schubert,M. ; Kasic,A. ; Figge,S. ; Diesselberg,M. ; Einfeldt,S. ; Hommel,D. ; Kohler,U. ; As,D.J. ; Off,J. ; Kuhn,B. ; Scholz,F. ; Woollam,J.A. ; Herzinger,C.M.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA.  pp.58-68,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4449
3.

Conference Proceedings
Conference Proceedings
3. Variable angle spectroscopic ellipsomefry in the vacuum ultraviolet
Woollam,J.A. ; Hilfiker,J.N. ; Tiwald,T.E. ; Bungay,C.L. ; Synowicki,R.A. ; Meyer,D.E. ; Herzinger,C.M. ; Pfeiffer,G.L. ; Cooney,G.T. ; Green,S.E. ; Co,J.A.Woollam
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA.  pp.197-205,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4099
4.

Conference Proceedings
Conference Proceedings
4. Real-time monitoring and control during MBE growth of GaAs/AIGaAs Bragg reflectors using multiwave ellipsometry
Wagner,T. ; Johs,B.D. ; Herzinger,C.M. ; He,P. ; Pittal,S. ; Woollam,J.A.
Pub. info.: Polarimetry and ellipsometry : 20-23 May, 1996, Kazimierz Dolny, Poland.  pp.301-307,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3094
5.

Conference Proceedings
Conference Proceedings
5. Application of generalized ellipsometry to complex optical systems
Schubert,M. ; Rheinlander,B. ; Woollam,J.A. ; Johs,B.D. ; Herzinger,C.M.
Pub. info.: Polarimetry and ellipsometry : 20-23 May, 1996, Kazimierz Dolny, Poland.  pp.255-265,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3094