1.

Conference Proceedings

Conference Proceedings
Hertwig,M.
Pub. info.: Optical inspection and micromeasurements II : 16-19 June 1997, Munich, FRG.  pp.90-105,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3098
2.

Conference Proceedings

Conference Proceedings
Moesner,F.M. ; Higuchi,T. ; Hertwig,M. ; Tanii,Y.
Pub. info.: Microrobotics : components and applications : 21-22 November, 1996, Boston, Massachusetts.  pp.118-127,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2906