1.

Conference Proceedings
Conference Proceedings
1. ROOM TEMPERATURE NITRIDATION AND OXIDATION OF Si, Ge AND MBE-GROWN SiGe USING LOW ENERGY ION BEAMS (0.1 - 1 keV)
Vancauwenberghe, O. ; Hellman, O. C. ; Herbots, N. ; Olson, J. L. ; Tan, W. J. ; Croft, W. J.
Pub. info.: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.235-240,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 223
2.

Conference Proceedings
Conference Proceedings
2. *DIRECT FORMATION OF THIN FILMS AND EPITAXIAL OVERLAYERS AT LOW TEMPERATURES USING A LOW-ENERGY (10-500 eV) ION BEAM DEPOSITION SYSTEM
Zuhr, R. A ; Alton, G. D. ; Appleton, B. R. ; Herbots, N. ; Noggle, T. S. ; Pennycook, S. J.
Pub. info.: Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.243-252,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 93
3.

Conference Proceedings
Conference Proceedings
3. SILICIDED SHALLOW JUNCTION FORMATION USING ION IMPLANTATION AND THERMAL ANNEALING
Rubin, Leonard M. ; Herbots, N. ; Hoffman, D. ; Ma, D.
Pub. info.: Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.641-646,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 128
4.

Conference Proceedings
Conference Proceedings
4. ION BEAM DEPOSITION OF MATERIALS AT 40-200 eV: EFFECT OF ION ENERGY AND SUBSTRATE TEMPERATURE ON INTERFACE, THIN FILM AND DAMAGE FORMATION
Herbots, N. ; Appleton, B.R. ; Pennycook, S.J. ; Noggle, T.S. ; Zuhr, R.A.
Pub. info.: Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA.  pp.369-374,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 51
5.

Conference Proceedings
Conference Proceedings
5. *INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITIOIN
Appleton, B.R. ; Zuhr, R.A. ; Noggle, T.S. ; Herbots, N. ; Pennycook, S.J.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.319-332,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
6.

Conference Proceedings
Conference Proceedings
6. INTERFACE FAILURE OF GOLD COVERED SiO2 SUBSTRATE WITH TiW AND Nb INTERMEDIATE ADHESION LAYERS
Leihr, M. ; Delrue, J. P. ; Herbots, N. ; Vanden Berghe, R. ; Caudano, R.
Pub. info.: Electronic packaging materials science : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A..  pp.405-412,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 40
7.

Conference Proceedings
Conference Proceedings
7. Discovery of Long-Range Order in Thin (2-20 nm) SiO2 Films by Ion-Beam Analysis
Herbots, N. ; Atluri, V. ; Hurst, Q. B. ; Shaw, J. M. ; Banerjee, S. ; Bradley, J. D. ; Culbertson, R. J. ; Smith, D. J.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.137-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
8.

Conference Proceedings
Conference Proceedings
8. H-Passivation of Si(100) by Wet Chemical Cleaning: Discovery of Ordering
Atluri, V. ; Herbots, N.
Pub. info.: Hydrogen in semiconductors and metals : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.399-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 513
9.

Conference Proceedings
Conference Proceedings
9. Long-Range Order in Ultrathin SiO2 Grown on Ordered Si(100)
Hurst, Q. B. ; Herbots, N. ; Shaw, J. M. ; Floyd, M. M. ; Smith, D. J. ; Culbertson, R. J. ; Grams, M. P. ; Bradley, J. D. ; Zimmerman, P. ; Atluri, V.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.181-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
10.

Conference Proceedings
Conference Proceedings
10. *INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITION
Appleton, B.R. ; Zuhr, R.A. ; Noggle, T.S. ; Herbots, N. ; Pennycook, S.J.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.45-58,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74