1.

Conference Proceedings
Conference Proceedings
1. Scandium and Gallium Implantation Doping of Silicon Carbide
Henkel, T. ; Tanaka, Y. ; Kobayashi, N. ; Koutzarov, I. ; Okumura, H. ; Yoshida, S. ; Ohshima, T.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.163-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
2.

Conference Proceedings
Conference Proceedings
2. Structural and electrical properties of beryllium implanted silicon carbide
Henkel, T. ; Tanaka, Y. ; Kobayashi, N. ; Tanoue, H. ; Gong, M. ; Chen, X. D. ; Fung, S. ; Beling, C. D.
Pub. info.: Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.117-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 572
3.

Conference Proceedings
Conference Proceedings
3. Beryllium Implantation Doping of Silicon Carbide
Henkel, T. ; Tanaka, Y. ; Kobayashi, N. ; Nishizawa, S. ; Hishita, S.
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.953-956,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(2)
4.

Conference Proceedings
Conference Proceedings
4. Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching
Henkel, T. ; Ferro, G. ; Nishizawa, S. ; Pressler, H. ; Tanaka, Y. ; Tanoue, H. ; Kobayashi, N.
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.481-484,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(1)
5.

Conference Proceedings
Conference Proceedings
5. Comparative study of simulations and experiments for contact array patterns on attenuated phase shilling mask [5992-188]
Henkel, T. ; Sczyrba, M. ; Noelscher, C.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59925G-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
6.

Conference Proceedings
Conference Proceedings
6. High-accuracy simulation-based optical proximity correction
Keck, M.C. ; Henkel, T. ; Ziebold, R. ; Crell, C. ; Thiele, J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.926-936,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256