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14 results

Conference Proceedings

1. SELECTIVE OXIDATION AND ETCHING OF REACTED Pt FILMS ON GaAs

Weiss, Eliezer ; Keller, Robert C. ; Kniffin, Margaret L. ; Helms, C. R.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.253-258, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

2. STUDIES OF THE ETCHING OF Si, SiO2, AND Mo BY CARBON FLUORINE COMPOUNDS USING REAL TIME AUGER SPECTROSCOPY

Thomson, D. ; Helms, C. R.

Pub. info.:	Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.155-156, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	38

Conference Proceedings

3. PHASE STABILITY OF MOLYBDENUM-SILICON NITRIDE-SILICON MIS SCHOTTKY DIODE AT HIGH TEMPERATURES

Park, Heungsoo ; Helms, C. R.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.521-526, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

4. THE EFFECT OF AQUEOUS CHEMICAL CLEANING PROCEDURES ON SCHOTTKY CONTACTS TO N-TYPE GaAs

Kniffin, M. L. ; Helms, C. R.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.565-568, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

5. Au OHMIC CONTACTS TO P-TYPE Hg1-xCdxTe UTILIZING THIN INTERFACIAL LAYERS

Krishnamurthy, V. ; Simmons, A. ; Helms, C. R.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.449-454, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

6. EFFECT OF SURFACE IRON ON GATE OXIDE INTEGRITY AND ITS REMOVAL FROM SILICON SURFACES

Park, Heungsoo ; Helms, C. R. ; Ko, Daehong ; Tran, M. ; Triplett, B. B.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.353-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

Conference Proceedings

7. GENERALIZED MODEL OF METAL BONDING AND CLEANING FROM WAFER SURFACES

Helms, C. R. ; Park, Heungsoo

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.287-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

Conference Proceedings

8. Iron Deposition from SC-1 on Silicon Wafer Surfaces

Dhanda, S. ; Helms, C. R. ; Gupta, P. ("Kim") ; Triplett, B. B. ; Tran, M.

Pub. info.:	Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.201-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	386

Conference Proceedings

9. New Method to Characterize Thin Oxide Reliability

Lin, Heng-Chih ; Snyder, J. P. ; Helms, C. R.

Pub. info.:	Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.237-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	386

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Conference Proceedings

10. The Effect of Roughness Features on MOS Surface Electric Field and Fowler-Nordheim Tunneling Behavior

Lin, Heng-Chih ; Kan, Edwin C. ; Yamanaka, Toshiaki ; Fang, Simon J. ; Eason, Kwame N. ; Helms, C. R.

Pub. info.:	Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.175-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	473

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Author: Helms, C. R.