1.

Conference Proceedings
Conference Proceedings
1. Nanostructured Arrays Formed by Finely Focused Ion Beams
Zuhr, R. A. ; Budai, J. D. ; Datskos, P. G. ; Meldrum, A. ; Thomas, K. A. ; Warmack, R. J. ; White, C. W. ; Feldman, L. C. ; Strobel, M. ; Heinig, K-H.
Pub. info.: Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.251-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 536
2.

Conference Proceedings
Conference Proceedings
2. Nanopatterning of Thin CobaltDisilicide Layers by Local Oxidation
Klinkhammer, F. ; Kappius, L. ; Antons, A. ; Dolle, M. ; Trinkaus, H. ; Mesters, St. ; Bochem, H-P. ; Mantl, S. ; Heinig, K-H.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.163-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514