1.

Conference Proceedings
Conference Proceedings
1. Characterization of ArF immersion process for production (Invited Paper)
Kohler, C. ; de Boeij, W. ; van Ingen-Schenau, K. ; van de Kerkhof, M. ; de Klerk, J. ; Kok, H. ; Swinkels, G. ; Finders, J. ; Mulkens, J. ; Fiolka, D. ; Heil, T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.13-22,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Impact of wavefront errors on low k1 processes at extremely high NA
Graeupner, P. ; Garreis, R.B. ; Goehnermeier, A. ; Heil, T. ; Lowisch, M. ; Flagello, D.G.
Pub. info.: Optical Microlithography XVI.  Part One  pp.119-130,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. Predictive modeling of advanced illumination pupils used as imaging enhancement for low-k1 applications
Heil, T. ; Graupner, P. ; Garreis, R. ; Egger, R. ; Brotsack, M. ; Finders, J. ; Hansen, S.
Pub. info.: Optical Microlithography XVII.  pp.344-356,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
4.

Conference Proceedings
Conference Proceedings
4. EUV imaging: an aerial image study
Lowisch, M. ; Dinger, U. ; Mickan, U. ; Heil, T.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.53-63,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374