1.

Conference Proceedings

Conference Proceedings
Hobbs, C. ; Grant, J. ; Kher, S. ; Dhandapani, V. ; Taylor, B. ; Dip, L. ; Hegde, R. ; Metzner, C. ; Tseng, H. ; Gilmer, D. ; Franke, A. ; Garcia, R. ; Ilebert, L. ; Azrak, M. ; Sing, D. ; Stephens, J.K ; Scrogum, C. ; Rai, R. ; Becnel, V ; Conner, I ; White, B. ; Tobin, P.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.361-366,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
2.

Conference Proceedings

Conference Proceedings
Gilmer, D.C. ; Hobbs, C. ; Grant, J. ; Hegde, R. ; Tseng, H. ; Triyoso, D. ; Roan, D. ; Cotton, R. ; Smith, J ; Dhandapani, V ; Garcia, R. ; Dip, L. ; Rai, R. ; Conner, J ; Samavedam, S. ; Taylor, B. ; Tobin, P.J.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.345-360,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
3.

Conference Proceedings

Conference Proceedings
Reid, K.G. ; Tseng, H. ; Hegde, R. ; Miner, G. ; Xing, G.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.23-30,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
4.

Conference Proceedings

Conference Proceedings
Nattgia, A. ; Mihopoules, T. ; Hegde, R. ; Cole, J.E.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.586-596,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
5.

Conference Proceedings

Conference Proceedings
Mocala, K. ; Crabtree, P. ; Mocala, E. ; Hegde, R. ; Lao, K. ; Laberge, P.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.395-400,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
6.

Conference Proceedings

Conference Proceedings
Hobbs, C. ; Hegde, R. ; Maiti, B. ; Nagabushnam, R. ; La, L. ; Reid, K. ; Dip, A. ; Grove, L. ; Conner, J. ; Kaushik, V. ; Prabhu, L. ; Anderson, A. ; Bagchi, S. ; Mendonca, J. ; Tobin, P.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.379-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
7.

Conference Proceedings

Conference Proceedings
Veteran, J. ; Hobbs, C. ; Hegde, R. ; Tobin, P. ; Wang, V. ; Tseng, H. ; Kenig, G. ; Hartig, M. ; Tamagawa, T. ; Doran, R. ; Makowicz, P. ; Schmitt, J. ; Halpern, B. ; Zhang, J. Z.
Pub. info.: Chemical aspects of electronic ceramics processing : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.445-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 495
8.

Conference Proceedings

Conference Proceedings
Hobbs, C. ; Fonseca, L. ; Samavedam, S. ; Grant, J. ; Dhandapani, V. ; Taylor, B. ; Dip, L. ; Triyoso, D. ; Gilmer, D. ; Schaeffer, J. ; Hegde, R. ; Tseng, H ; White, B. ; Tobin, P.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.313-320,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
9.

Conference Proceedings

Conference Proceedings
Nguyen, B.Y. ; Tobin, P.J. ; McNelly, T.F. ; Hayden, J.D. ; Breaux, L. ; Hegde, R.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.316-325,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35