1.

Conference Proceedings
Conference Proceedings
1. Dopant Mapping and Strain Analysis B Doped Silicon Structures Using Micro-Raman Spectroscopy
Bowden, M. ; Gardiner, D. J. ; Lourenco, M. A. ; Hedley, J. ; Wood, D. ; Burdess, J. S. ; Harris, A. J.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.239-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
2.

Conference Proceedings
Conference Proceedings
2. Reactive Ion Etching of Silicon Carbide with Patterned Boron Implantation
Vassilevski, K.V. ; Hedley, J. ; Horsfall, A.B. ; Johnson, C.M. ; Wright, N.G.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.925-928,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
3.

Conference Proceedings
Conference Proceedings
3. An optical workstation for characterization and modification of MEMS
Hedley, J. ; Burdess, J. S. ; Harris, A. J. ; Gallacher, B. J. ; McNeil, C. J. ; Cumpson, P. J. ; Enderling, S.
Pub. info.: Optical Micro- and Nanometrology in Manufacturing Technology.  pp.244-252,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5458