1.

Conference Proceedings
Conference Proceedings
1. LOW-TEMPERATURE DEPOSITION OF ZrC THIN FILMS FROM A SINGLE-SOURCE PRECURSOR
Smith, David C. ; Rubiano, Rodrigo R. ; Healy, Matthew D. ; Springer, Robert W.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.643-652,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
2.

Conference Proceedings
Conference Proceedings
2. The Chemical Vapor Deposition of Al-Cu Films Utilizing Independent Aluminum and Copper Organometallic Sources in a Simultaneous Deposition
Healy, Matthew D. ; Norman, John A. T. ; Hochberg, Arthur K.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.289-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
3.

Conference Proceedings
Conference Proceedings
3. QUANTUM CONFINEMENT IN GaP NANOCLUSTERS
Laurich, Bernhard K. ; Smith, David C. ; Healy, Matthew D.
Pub. info.: Molecularly designed ultrafine/nanostructured materials : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.49-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 351
4.

Conference Proceedings
Conference Proceedings
4. THE ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION OF TRANSITION METAL CARBIDES: THE USE OF HOMOLEPTIC ALKYLS
Healy, Matthew D. ; Smith, David C. ; Rubiano, Rodrigo R. ; Springer, Robert W. ; Parmeter, John E.
Pub. info.: Covalent ceramics II : non-oxides : symposium held November 29 - December 2, 1993, Boston, Massachusetts, U.S.A..  pp.127-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 327