1.

Conference Proceedings
Conference Proceedings
1. CONTROL OF PROCESS-INDUCED DEFECTS IN THE FORMATION OF SINGLE AND MULTIPLE LAYER DIELECTRIC STRUCTURES FOR Si SEMICONDUCTOR DEVICES
He, S. S. ; Stephens, D. J. ; Ma. Y. ; Yasuda, T. ; Habermehl, S. ; Lucovsky, G.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.653-658,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
2.

Conference Proceedings
Conference Proceedings
2. Hydrogen Bond Configuration in PECVD Silicon Nitride Films During RTA
He, S. S. ; Shannon, V. L.
Pub. info.: Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A..  pp.337-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 377
3.

Conference Proceedings
Conference Proceedings
3. BACK-CHANNEL SURFACE MODIFICATIONS FOR a-Si:H THIN FILM TRANSISTORS, TFTs, BY EXPOSURE TO PLASMA EXCITED N2O
He, S. S. ; Stephens, D. J. ; Lucovsky, G.
Pub. info.: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.489-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 318
4.

Conference Proceedings
Conference Proceedings
4. Hydrogen Behavior in PECVD Nitride by SiH4 and ND3 During RTA
He, S. S. ; Shannon, V. L. ; Nguyen, T.
Pub. info.: Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.109-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 424
5.

Conference Proceedings
Conference Proceedings
5. DEPOSITION OF MICROCRYSTALLINE Si,Ge (ｦﾌc-Si,Ge) ALLOYS BY REACTIVE MAGNETRON SPUTTERING
Cho, S. M. ; Wolfe, D. ; He, S. S. ; Christensen, K. ; Maher, D. M. ; Lucovsky, G.
Pub. info.: Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.781-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 358
6.

Conference Proceedings
Conference Proceedings
6. MICROSTRUCTURE OF Si FILMS DEPOSITED ON Si(100) SURFACES BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION, RPECVD: DEPENDENCE ON PROCESS PRESSURE AND SUBSTRATE TEMPERATURE
Habermehl, S. ; He, S. S. ; Chen, Y. L. ; Lucovsky, G.
Pub. info.: Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A..  pp.379-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 311