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Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California. pp.191-197, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Smart materials, structures, and MEMS : 11-14 December 1996, Bangalore, India. pp.104-113, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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