Namavar, F. ; Budnick, J. I ; Fasihuddin, A. ; Hayden, H. C. ; Pease, D. A. ; Otter, F. A. ; Patarini, V.
Pub. info.:
Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.347-352, 1984. New York. North-Holland
Namavar, F. ; Budnick, J. I. ; Sanchez, F. H. ; Hayden, H. C.
Pub. info.:
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.317-322, 1985. Pittsburgh, Pa.. Materials Research Society