Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

11 results

Conference Proceedings

1. GaAs HETEROEPITAXY ON SUBSTRATE-ENGINEERED SILICON USING SiXGe1-X MULTILAYER STRUCTURE

Posthill, J. B. ; Venkatasubramanian, R. ; Malta, D. P. ; Hattangady, S. V. ; Fountain, G. G. ; Timmons,. M. L. ; Markunas, R. J.

Pub. info.:	Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.219-224, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	198

Conference Proceedings

2. HETEROEPITAXIAL CXSi1-X/Si(100) METASTABLE ALLOYS

Posthill, J. B. ; Rudder, R. A. ; Hattangady, S. V. ; Fountain, G. G ; Humphreys, T. P. ; Nemanich, R. J. ; Parikh, N. R. ; Markunas, R. J.

Pub. info.:	Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.497-502, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	198

Conference Proceedings

3. GALLIUM ARSENIDE SURFACE INVERSION USING A NOVEL SILICON-SILICON DIOXIDE INSULATOR STRUCTURE

Fountain, G. G. ; Rudder, R. A. ; Hattangady, S. V. ; Markunas, R. J. ; Vitkavage, D. J.

Pub. info.:	Advances in materials, processing, and devices in III-V compound semiconductors. pp.537-544, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	144

Conference Proceedings

4. 300°C PROCESSING OF Si USING REMOTE PLASMA TECHNIQUES FOR IN SITU CLEANING, EPITAXY, AND OXIDE/NITRIDE/OXIDE DEPOSITIONS

Fountain, G. G. ; Hattangady, S. V. ; Rudder, R. A. ; Posthill, J. B. ; Markunas, R. J.

Pub. info.:	Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.139-148, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	146

Conference Proceedings

5. RBS/CHANNELING AND TEM ANALYSIS OF HETEROEPITAXIAL Ge FILMS ON GaAs GROWN BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Parikh, N. R. ; Hattangady, S. V. ; Posthill, J. B. ; King, M. L. ; Rudder, R. A. ; Vitkavage, D. J. ; Markunas, R. J. ; Chu, W. K.

Pub. info.:	Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.275-278, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	102

Conference Proceedings

6. INTEGRATED PROCESSING OF STACKED GATE DIELECTRIC STRUCTURES WITH MULTISTEP REMOTE-PLASMA PROCESSING

Hattangady, S. V. ; Fountain, G. G. ; Alley, R. G. ; Rudder, R. A. ; Markunas, R. J.

Pub. info.:	Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.335-340, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	224

Conference Proceedings

7. COMPOSITIONAL DETERMINATIONS OF OXIDE-NITRIDE-OXIDE STACKED DIELECTRIC

Waytena, G. L. ; Hren, J. ; Weiss, J. k> ; Rez, P. ; Fountain, G. G,. ; Hattangady, S. V.

Pub. info.:	Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.. pp.197-202, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	268

Conference Proceedings

8. Integrated Processing of Silicon Oxynitride Alloy Dielectrics by Plasma-Assisted Oxidation, Chemical Vapor Deposition, and On-Line Rapid Thermal Annealing

Hattangady, S. V. ; Niimi, H. ; Gandhi, S. ; Lucovsky, G.

Pub. info.:	Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.213-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	387

Conference Proceedings

9. CONTROL OF Si-SiO2 INTERFACE PROPERTIES IN MOS DEVICES PREPARED BY PLASMA-ASSISTED AND RAPID THERMAL PROCESSES

Lucovsky, G. ; Yasuda, T. ; Ma, Y. ; Hattangady, S. V. ; Xu, X-L. ; Misra, V. ; Hornung, B. ; Wortman, J. J.

Pub. info.:	Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.81-, 1994. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	318

10.

Conference Proceedings

10. IN-SITU SURFACE CLEANING OF Ge(111) AND Si(100) FOR EPITAXIAL GROWTH OF Ge AT 300°C USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Hattangady, S. V. ; Rudder, R. A. ; Fountain, G. G. ; Vitkavage, D. J. ; Markunas, R. J.

Pub. info.:	Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.319-322, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	102

11 results

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

Filtering by: