1.

Conference Proceedings
Conference Proceedings
1. New approach for realizing k1=0.3 optical lithography
Hasegawa, M. ; Suzuki, A. ; Saito, K. ; Yoshii, M.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.278-289,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
2.

Conference Proceedings
Conference Proceedings
2. Data hiding method in adaptive lossless coding scheme
Kato, S. ; Hasegawa, M.
Pub. info.: Visual Information Processing XI.  pp.176-183,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4736
3.

Conference Proceedings
Conference Proceedings
3. Development of low-loss optical coatings for 157-nm lithography
Biro, R. ; Sone, K. ; Niisaka, S. ; Otani, M. ; Suzuki, Y. ; Ouchi, C. ; Saito, T. ; Hasegawa, M. ; Saito, J. ; Tanaka, A. ; Matsumoto, A.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1625-1634,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. Challenging the limit of single mask exposure
Yamazoe, K. ; Hasegawa, M. ; Saitoh, K. ; Suzuki, A.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1601-1612,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
5.

Conference Proceedings
Conference Proceedings
5. Silylation of Silicalite Membrance and Its Pervaporation Performance
Sano, T. ; Yamada, K. ; Ejiri, S. ; Hasegawa, M. ; Kawakami, Y. ; Yanagishita, H.
Pub. info.: Progress in zeolite and microporous materials : proceedings of the 11th International Zeolite Conference, Seoul, Korea, August 12-17, 1996.  C  pp.2179-,  1997.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 105
6.

Conference Proceedings
Conference Proceedings
6. Identification of Vacancy-Oxygen Complexes in Si by Coincidence Doppler Broadening of Positron Annihilation Radiation and First-Principles Calculations
Tang, Z. ; Nonaka, T. ; Nagai, Y. ; Hasegawa, M.
Pub. info.: Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany.  pp.67-69,  2001.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 363-365
7.

Conference Proceedings
Conference Proceedings
7. Innovation of MBS Powder
Morikawa, H. ; Kato, S. ; Yasui, H. ; Hasegawa, M. ; Shimizu, T.
Pub. info.: Plastics-pioneering the 21st century : conference proceedings.  pp.669-673,  1987.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 33
8.

Conference Proceedings
Conference Proceedings
8. Electronic Structure of Nanosized bcc Cu Precipitates in Fe-Cu Alloys Studied by Positron 2D-ACAR
Chiba, T. ; Nagai, Y. ; Tang, Z. ; Akahane, T. ; Hasegawa, M. ; Takenaka, M. ; Kuramoto, E.
Pub. info.: Positron annihilation ICPA-13 : proceedings of the 13th International Conference on Positron Annihilation, Kyoto, Japan, September 2003.  pp.380-384,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 445-446
9.

Conference Proceedings
Conference Proceedings
9. First-Principles Calculation of Positron Annihilation Characteristics in Solids: From Positron to Positronium
Tang, Z. ; Hasegawa, M. ; Nagai, Y. ; Saito, M.
Pub. info.: Positron annihilation ICPA-13 : proceedings of the 13th International Conference on Positron Annihilation, Kyoto, Japan, September 2003.  pp.390-394,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 445-446
10.

Conference Proceedings
Conference Proceedings
10. Potentials of Silicalite Membranes for Separation of Alcohol/Water Mixtures
Sano, T. ; Hasegawa, M. ; Kawakami, Y. ; Kiyozumi, Y. ; Yanagishita, H. ; Kitamoto, D. ; Mizukami, F.
Pub. info.: Zeolites and related microporous materials : state of the art 1994 : proceedings of the 10th International Zeolite Conference, Garmisch-Partenkirchen, Germany, July 17-22, 1994.  B  pp.1175-,  1994.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 84