1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF NOVEL HIGH ε DIELECTRIC AND FERROELECTRIC FILMS BY SCANNING PROBE MICROSCOPY (SPM) TECHNIQUES
Landau, S. ; Kolbesen, B.O. ; Tillman, R. ; Bruchhaus, R. ; Olbrich, A. ; Fritsch, B. ; Dehm, C. ; Schindler, G. ; Hartner, W. ; Mazure, C.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.789-797,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings
Conference Proceedings
2. An Overview of FeRAM Technology for High Density Applications
Dehm, C. ; Schindler, G. ; Hartner, W. ; Bergmann, R. ; Hasler, B. ; Kasko, I. ; Kastner, M. ; Schiele, M. ; Weinrich, V. ; Mazure, C.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.73-88,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
3.

Conference Proceedings
Conference Proceedings
3. Scanning Probe Microscopy (SPM) for the Investigation of Local Electrical Properties of High-K Dielectric/Ferroelectric Films
Landau, S. A. ; Weiss, P-A. ; Junghans, N. ; Kolbesen, B. O. ; Adderton, D. ; Schindler, G. ; Hartner, W. ; Hintermaier, F. ; Dehm, C. ; Mazure, C.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.567-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
4.

Conference Proceedings
Conference Proceedings
4. Origin of Imprint in Ferroelectric CSD SrBi2Ta2O9 Thin Films
Grossmann, M. ; Lohse, O. ; Bolten, D. ; Waser, R. ; Hartner, W. ; Schindler, G. ; Nagel, N. ; Dehm, C.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.269-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541
5.

Conference Proceedings
Conference Proceedings
5. Reversible and Irreversible Contributions to the Polarization in SrBi2Ta2O9 Ferroelectric Capacitors
Lohse, O. ; Bolten, D. ; Grossmann, M. ; Waser, R. ; Hartner, W. ; Schindler, G.
Pub. info.: Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.267-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 493
6.

Conference Proceedings
Conference Proceedings
6. Complementary feed-forward and feedback method for improved critical dimension control
Jekauc, I. ; Gould, C.J. ; Hartner, W. ; Urenda, T.
Pub. info.: Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA.  pp.116-123,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5378