1.

Conference Proceedings
Conference Proceedings
1. Advanced mix-and-match using a high-NA i-line scanner
Kuijten,J.P. ; Harris,T.A. ; Heijden,L.van der ; Witko,D. ; Cossins,J. ; Foster,J. ; Ritchie,D.R.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.843-856,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Submicron calibration strategy for CD control
Chain,E.E. ; Kulkens,L. ; Harris,T.A.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II.  pp.250-256,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2876