1.

Conference Proceedings
Conference Proceedings
1. SELF-ALIGNED FORMATION OF C54 TITANIUM GERMANOSILICIDE USING RAPID THERMAL PROCESSING AND APPLICATION TO RAISED, ULTRA-SHALLOW JUNCTIONS
Ashburn, Stanton P. ; Grider, Douglas T. ; Ozturk, Mehmet C. ; Harris, Gari ; Maher, Dennis M.
Pub. info.: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.311-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 320
2.

Conference Proceedings
Conference Proceedings
2. NUCLEATION AND GROWTH OF POLYCRYSTALLINE SILICON FILMS IN AN ULTRA HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR USING DISILANE AND HYDROGEN
Violette, Katherine E. ; Ozturk, Mehmet ; Harris, Gari ; Sanganeria, Mahesh K. ; Lee, Archie ; Maher, Dennis M.
Pub. info.: Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.673-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 343
3.

Conference Proceedings
Conference Proceedings
3. CLEANING DURING INITIAL STAGES OF EPITAXIAL GROWTH IN AN ULTRA-HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR
Sanganeria, Mahesh K. ; Violette, Katherine E. ; Ozturk, Mehmet C. ; Harris, Gari ; Lee, C. Archie ; Maher, Dennis M.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.463-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
4.

Conference Proceedings
Conference Proceedings
4. SILICON NUCLEATION ON SILICON DIOXIDE AND SELECTIVE EPITAXY IN AN ULTRA-HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION REACTOR USING DISILANE IN HYDROGEN
Violette, Katherine E. ; Sanganeria, Mahesh K. ; Ozturk, Mehmet C. ; Harris, Gari ; Maher, Dennis M.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.519-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334