1.

Conference Proceedings
Conference Proceedings
1. EVALUATION OF SUBSURFACE ION IMPLANT DAMAGE BY PHOTOTHERMAL DISPLACEMENT MEASUREMENT
Takamatsu, Hiroyuki ; Sumie, Singo ; Nishimoto, Yoshiro ; Tsunaki, Hidetoshi ; Nishine, Koichi ; Hara, Tohru
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.261-266,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. Cleaning of Cu in the Cu Dual Damascene Process
Hara, Tohru ; Awaya, Nobuyoshi
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.489-498,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
3.

Conference Proceedings
Conference Proceedings
3. Direct CMP of Low ε Organic Layers by MnO2 Slurry
Hara, Tohru ; Tomizawa, Tomohiro ; Kurosu, Toshiaki ; Doy, Toshiro K.
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.261-269,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
4.

Conference Proceedings
Conference Proceedings
4. Characterization of Novel Post Cu CMP Cleaners Using Cu Contaminated Interlayer Dielectrics
Kabayashi, Ichiro ; Fujita, Yoichiro ; Miyazawa, Tomoe ; Fukuro, Hiroyoshi ; Stevens, Russell D. ; Hara, Tohru
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.273-279,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-26
5.

Conference Proceedings
Conference Proceedings
5. RAPID THERMAL PROCESSING OF SILICON ION IMPLANTED CHANNEL LAYERS IN GaAs
Hara, Tohru ; Gelpey, Jeffrey C.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.417-424,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
6.

Conference Proceedings
Conference Proceedings
6. Damage Profiles in Ion Implanted Silicon
Hara, Tohru ; Muraki, Takeshi ; Sakurai, Masataka ; Takeda, Satoru
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II.  pp.234-245,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-3