1.

Conference Proceedings
Conference Proceedings
1. Improved Shallow Trench Isolation Process for Sub-Quarter-Micron CMOS Technologies
Sallagoity, P. ; Gaillard, F. ; Rivoire, M. ; Paoli, M. ; Brouquet, P. ; Haond, M. ; McClathie, S. ; Beekmann, K. ; Kiermasz, A. ; Dobson, C.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.453-466,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
2.

Conference Proceedings
Conference Proceedings
2. GROWTH-FRONT MODULATION IN LAMP ZONE MELTING OF Si ON SiO2
Dutartre, D. ; Bensahel, D. ; Haond, M.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.561-566,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
3.

Conference Proceedings
Conference Proceedings
3. Improved Reliability with a New Plasma NH3 Process for 0.35 ｦﾌm P+ Poly-Gate Nitrided Oxide P-MOSFETs
Bravaix, A. ; Vuillaume, D. ; Goguenheim, D. ; Lasserre, V. ; Straboni, A. ; Haond, M.
Pub. info.: Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A..  pp.91-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 446
4.

Conference Proceedings
Conference Proceedings
4. <100>SINGLE CRYSTAL SOI FILMS OBTAINED ON 4. in WAFERS USING HALOGEN LAMPS
Haond, M. ; Dutartre, D. ; Bensahel, D.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.83-88,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53
5.

Conference Proceedings
Conference Proceedings
5. IMPROVEMENT OF WETTING OF SILICON ON INSULATOR DURING LAMP ZONE MELTING USING PLASMA NITRIDATION
Haond, M. ; Dutartre, D. ; Pantel, R. ; Straboni, A. ; Vuillermoz, B.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.59-64,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53
6.

Conference Proceedings
Conference Proceedings
6. MICROSCOPY OF THIN Si FILMS DURING LAMP ZONE MELTING
Dutartre, D. ; Haond, M. ; Bensahel, D.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.89-94,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53