1.

Conference Proceedings

Conference Proceedings
Zafar, S. ; Poler, J. C. ; Irene, E. A. ; Xu, X. ; Hames, G. ; Kuehn, R. ; Wortman, J. J.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.325-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
2.

Conference Proceedings

Conference Proceedings
Zhang, K.X. ; Osburn, C.M. ; Hames, G. ; Parker, C. ; Bayoumi, A.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.68-79,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5