Golz, John ; Di, Y.D. ; Halpern, B. ; Schmitt, J.-J. ; Cirino, Phil ; Bartlett, A.
Pub. info.:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.541-546, 1993. Pittsburgh, Pa.. Materials Research Society
Wang, X.W. ; Ma, T.P. ; Cui, G.J. ; Tamagawa, T. ; Schmitt, J.J. ; Halpern, B.
Pub. info.:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.332-337, 1997. Pennington, New Jersey. Electrochemical Society
Veteran, J. ; Hobbs, C. ; Hegde, R. ; Tobin, P. ; Wang, V. ; Tseng, H. ; Kenig, G. ; Hartig, M. ; Tamagawa, T. ; Doran, R. ; Makowicz, P. ; Schmitt, J. ; Halpern, B. ; Zhang, J. Z.
Pub. info.:
Chemical aspects of electronic ceramics processing : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.. pp.445-, 1998. Warrendale, Pa.. MRS - Materials Research Society