1.

Conference Proceedings
Conference Proceedings
1. Fabrication and characterization of SiO2 microcantilever for high sensitive moisture sensor
Q. Chen ; J. Fang ; H.-F. Ji ; K. Varahraman
Pub. info.: Microfluidics, bioMEMS, and medical microsystems V : 22-24 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6465
2.

Conference Proceedings
Conference Proceedings
2. Micromechanical sensors based on conformational change of proteins
X. Yang ; K. R. Buchapudi ; H. Gao ; X. Xu ; H.-F. Ji
Pub. info.: Micro (MEMS) and nanotechnologies for space, defense and security II : 18-20 April, 2008, Orlando, Florida, USA.  pp.69590N-1-69590N-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6959