1.

Conference Proceedings
Conference Proceedings
1. 4H-SiC Trench MOSFET with Thick Bottom Oxide
H. Takaya ; J. Morimoto ; T. Yamamoto ; J. Sakakibara ; Y. Watanabe
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.683-686,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
2.

Conference Proceedings
Conference Proceedings
2. EUV mask pattern inspection using current DUV reticle inspection tool
T. Abe ; A. Fujii ; S. Sasaki ; H. Mohri ; H. Imai ; H. Takaya ; Y. Sato ; N. Hayashi ; Y. Maenaka
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607