H. Shishido ; Y. Takaki ; M. Kozuka ; K. Matsumoto ; Y. Aruga
Pub. info.:
The 15th International Conference on Aluminium Alloys : selected, peer reviewed papers from the 15th International Conference on Aluminium Alloys (ICAA15), June 12-16, 2016, Chongqing, China. pp.455-460, 2017. Aedermannsdorf, Switzerland. Trans Tech Publications
M. Hashimoto ; H. Iwashita ; A. Kominato ; H. Shishido ; M. Ushida
Pub. info.:
Photomask and next-generation lithography mask technology XV. 1 pp.702804-1-702804-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering