1.

Conference Proceedings

Conference Proceedings
H. Kambayashi ; Y. Kurokawa ; H. Ota ; Y. Hoshiyama ; H. Miyake
Pub. info.: THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canada.  539-543  pp.1110-1115,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 539-543(2)
2.

Conference Proceedings

Conference Proceedings
T. Nabatame ; K. Iwamoto ; K. Akiyama ; Y. Nunoshige ; H. Ota
Pub. info.: Physics and technology of high-k gate dielectrics 5.  pp.543-555,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(4)
3.

Conference Proceedings

Conference Proceedings
A. Toriumi ; T. Nabatame ; H. Ota
Pub. info.: Atomic layer deposition applications 4.  pp.69-75,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(4)
4.

Conference Proceedings

Conference Proceedings
H. Ota ; A. Hirano ; Y. Watanabe ; N. Yashuda ; K. Iwamoto
Pub. info.: Physics and technology of high-k gate dielectrics 6.  pp.67-75,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(5)
5.

Conference Proceedings

Conference Proceedings
H. Ota ; T. Ishii ; T. Samukawa ; T. Ujiro ; H. Yamashita
Pub. info.: THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009.  pp.3435-3440,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 638-642
6.

Conference Proceedings

Conference Proceedings
K. Okada ; H. Ota ; A. Ogawa ; W. Mizubayashi ; T. Horikawa ; H. Satake ; T. Nabatame ; A. Toriumi
Pub. info.: Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5.  pp.179-190,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(1)
7.

Conference Proceedings

Conference Proceedings
Y. Watanabe ; H. Ota ; S. Migita ; Y. Kamimuta ; K. Iwamoto
Pub. info.: Physics and technology of high-k gate dielectrics 5.  pp.35-45,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(4)
8.

Conference Proceedings

Conference Proceedings
K. Okada ; H. Ota ; T. Nabatame ; A. Toriumi
Pub. info.: Silicon nitride, silicon dioxide, and emerging dielectrics 9.  pp.671-686,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(3)
9.

Conference Proceedings

Conference Proceedings
H. Ota ; A. Ogowa ; M. Kadoshima ; K. Iwamoto ; K. Okada ; H. Satake ; T. Nabatame ; A. Toriumi
Pub. info.: Physics and technology of high-k gate dielectrics 4.  pp.41-48,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(3)
10.

Conference Proceedings

Conference Proceedings
M. Kadoshima ; T. Nabatame ; M. Takahashi ; A. Ogawa ; K. Iwamoto ; W. Mizubasyashi ; H. Ota ; H. Satake ; A. Toriumi
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.287-294,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)