1.
Conference Proceedings
H. Kambayashi ; Y. Kurokawa ; H. Ota ; Y. Hoshiyama ; H. Miyake
Pub. info.:
THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canada . 539-543 pp.1110-1115, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:
Materials science forum
Ser. no.:
539-543(2)
2.
Conference Proceedings
T. Nabatame ; K. Iwamoto ; K. Akiyama ; Y. Nunoshige ; H. Ota
Pub. info.:
Physics and technology of high-k gate dielectrics 5 . pp.543-555, 2007. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
11(4)
3.
Conference Proceedings
A. Toriumi ; T. Nabatame ; H. Ota
Pub. info.:
Atomic layer deposition applications 4 . pp.69-75, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
16(4)
4.
Conference Proceedings
H. Ota ; A. Hirano ; Y. Watanabe ; N. Yashuda ; K. Iwamoto
Pub. info.:
Physics and technology of high-k gate dielectrics 6 . pp.67-75, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
16(5)
5.
Conference Proceedings
H. Ota ; T. Ishii ; T. Samukawa ; T. Ujiro ; H. Yamashita
Pub. info.:
THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009 . pp.3435-3440, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:
Materials science forum
Ser. no.:
638-642
6.
Conference Proceedings
K. Okada ; H. Ota ; A. Ogawa ; W. Mizubayashi ; T. Horikawa ; H. Satake ; T. Nabatame ; A. Toriumi
Pub. info.:
Physics and Chemistry of SiO2 and the Si-SiO2 Interface-5 . pp.179-190, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
1(1)
7.
Conference Proceedings
Y. Watanabe ; H. Ota ; S. Migita ; Y. Kamimuta ; K. Iwamoto
Pub. info.:
Physics and technology of high-k gate dielectrics 5 . pp.35-45, 2007. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
11(4)
8.
Conference Proceedings
K. Okada ; H. Ota ; T. Nabatame ; A. Toriumi
Pub. info.:
Silicon nitride, silicon dioxide, and emerging dielectrics 9 . pp.671-686, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
6(3)
9.
Conference Proceedings
H. Ota ; A. Ogowa ; M. Kadoshima ; K. Iwamoto ; K. Okada ; H. Satake ; T. Nabatame ; A. Toriumi
Pub. info.:
Physics and technology of high-k gate dielectrics 4 . pp.41-48, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
3(3)
10.
Conference Proceedings
M. Kadoshima ; T. Nabatame ; M. Takahashi ; A. Ogawa ; K. Iwamoto ; W. Mizubasyashi ; H. Ota ; H. Satake ; A. Toriumi
Pub. info.:
Physics and technology of high-k gate dielectrics III . pp.287-294, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
1(5)