1.

Conference Proceedings
Conference Proceedings
1. Three-dimensional X-ray lithography using a silicon mask with inclined absorbers
H. Mekaru ; T. Takano ; K. Awazu ; M. Takahashi ; R. Maeda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
2.

Conference Proceedings
Conference Proceedings
2. A novel fabrication method of needle array combined x-ray gray mask with LIGA process
H. Mekaru ; T. Takano ; K. Awazu ; M. Takahashi ; R. Maeda
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68001R-1-68001R-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800