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Photomask and next-generation lithography mask technology XV. 2 pp.70281Z-1-70281Z-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
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H. Michael Tulldahl ; C. Vahlberg ; A. Axelsson ; H. Karlsson ; P. Jonsson
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Lidar technologies, techniques, and measurements for atmospheric remote sensing III : 17 September 2007, Florence, Italy. pp.675003-1-675003-12, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
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Proceedings of SPIE - the International Society for Optical Engineering