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15 results

Conference Proceedings

1. Chemical Routes to Ultra Thin Films for Copper Barriers and Liners

John Ekerdt ; Jinhong Shin ; Wyatt Winkenwerder ; Hyun-Woo Kim ; Kelly Thom ; Gyeong S. Hwang ; Kyriacos Agapiou ; Richard A. Jones

Pub. info.:	Materials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics : symposium held April 10-12, 2007, San Francisco, California, U.S.A.. pp.93-94, 2007. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	990

Conference Proceedings

2. Ab-Initio Study of Boron Diffusion Retardation in Si1-xGex

Yonghyun Kim ; Taras A. Kirichenko ; Sanjay K. Banerjee ; Gyeong S. Hwang

Pub. info.:	Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.. pp.105-110, 2006. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	912

Conference Proceedings

3. Mechanisms for Interstitial-Mediated Transient Enhanced Diffusion of N-type Dopants

Scott A. Harrison ; Thomas F. Edgar ; Gyeong S. Hwang

Pub. info.:	Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.. pp.91-98, 2006. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	912

Conference Proceedings

4. Understanding of the Synthesis and Structure of Si Nanocrystals in an Oxide Matrix from First Principles Based Atomistic Modeling

Sangheon Lee ; Decai Yu ; Gyeong S. Hwang

Pub. info.:	Group IV semiconductor nanostructures--2006 : symposium held November 27-December 1, 2006, Boston, Massachusetts, U.S.A.. pp.301-306, 2007. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	958

Conference Proceedings

5. An Experimental and Simulation Study of Arsenic Diffusion Behavior in Point Defect Engineered Silicon

Ning Kong ; Taras A. Kirichenko ; Gyeong S. Hwang ; Foisy C. Mark ; Steven G. H. Anderson ; Sanjay K. Banerjee

Pub. info.:	Semiconductor defect engineering--materials, synthetic structures and devices II : symposium held April 9-13, 2007, San Francisco, California, U.S.A.. pp.307-314, 2007. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	994

Conference Proceedings

6. 310g. Stochastic Differential Charging and Its Effects on Charging Damage and Feature Profile Evolution during Plasma Processing

Eunsu Paek ; Gyeong S. Hwang

Pub. info.:	AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences. pp.P129038-, 2008. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-255

Conference Proceedings

7. 566c. First Principles Determination of Highly Mobile Dopant-Interstitial Complexes and Their Relative Contribution to Dopant Diffusion In Silicon

Kyoung E. Kweon ; Gyeong S. Hwang

Pub. info.:	AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences. pp.P129154-, 2008. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-255

Conference Proceedings

8. 734h. First Principles-Based Atomistic Modeling of the Growth and Structure of Native Defects In Silicon

Sangheon Lee ; Gyeong S. Hwang

Pub. info.:	AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences. pp.P129234-, 2008. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-255

Conference Proceedings

9. 510an. Structure And Stability Of Small Self-Interstitial And Vacancy Clusters In Silicon

Sangheon Lee ; Gyeong S. Hwang

Pub. info.:	2007 AIChE annual meeting : Salt Palace Convention Center, Salt Lake City, Utah, November 4-9, 2007 : conference proceedings. Non-Topical Conference. pp.P98584-, 2007. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-246

10.

Conference Proceedings

10. Mechanisms for Interstitial-Mediated Transient Enhanced Diffusion of Arsenic and Phosphorus Dopants

Scott A. Harrison ; Thomas F. Edgar ; Gyeong S. Hwang

Pub. info.:	2006 AIChE annual meeting, November 12-17, 2006, San Francisco, California, San Francisco Hilton : conference proceedings. Non-topical conferences. 2006. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-235

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