1.

Conference Proceedings
Conference Proceedings
1. Waferstepper Alignment For MEMS Applications Using Diffraction Gratings
Zeijl, H.W. van ; Simon, K. ; Slabbekoorn, J. ; Buel, W.v. ; Gui, C.Q.
Pub. info.: BioMEMS and bionanotechnology : symposium held April 1-3, 2002, San Francisco, California, U.S.A..  pp.235-480,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 729
2.

Conference Proceedings
Conference Proceedings
2. Front-to-back alignment metrology
Bijnen, F.G.C. ; Buel, W. ; Gui, C.Q. ; Lof, J.
Pub. info.: Emerging Lithographic Technologies VII.  2  pp.641-646,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
3.

Conference Proceedings
Conference Proceedings
3. Extended front-to-back alignment capability for MEMS/MOEMS applications
Gui, C.Q. ; van Buёl, W. ; Bijnen, F.G. ; Lof, J.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.867-873,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688