1.

Conference Proceedings
Conference Proceedings
1. Deposition of x-ray multilayers on long-size substrates for synchrotron applications
Platonov,Yu.Ya. ; Broadway,D. ; DeGroot,B. ; Verman,B. ; Kim,B. ; Gutman,G. ; Wood,J.L. ; Rodriguez,J. ; Grupido,N.
Pub. info.: Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California.  pp.231-239,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3152
2.

Conference Proceedings
Conference Proceedings
2. Three-aspherical-mirror system for EUV lithography (Invited Paper)
Kinoshita,H. ; Watanabe,T. ; Niibe,M. ; Ito,M. ; Oizumi,H. ; Yamanashi,H. ; Murakami,K. ; Oshino,T. ; Platonov,Y.Y. ; Grupido,N.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.20-31,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331