1.

Conference Proceedings

Conference Proceedings
Ley, L. ; Stark, T. ; Hundhausen, M. ; Gruenleitner, H.
Pub. info.: In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A..  pp.145-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 569
2.

Conference Proceedings

Conference Proceedings
Kuznetsov, A.Yu. ; Janson, M.S. ; Hallen, A. ; Svensson, B.G. ; Jagadish, C. ; Gruenleitner, H. ; Pensl, G.
Pub. info.: Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000.  pp.595-598,  2001.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 353-356