1.

Conference Proceedings
Conference Proceedings
1. ICP Etching of SiC
Wang, J. J. ; Lambers, E. S. ; Pearton, S. J. ; Ostling, M. ; Zetterling, C-M. ; Grow, J. M. ; Ren, F.
Pub. info.: Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A..  pp.177-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 483
2.

Conference Proceedings
Conference Proceedings
2. Electron Cyclotron Resonance Etching of SiC in SF6/O2 and NF3/O2 Plasmas
Ren, F. ; Grow, J. M. ; Bhaskaran, M. ; Lee, J. W. ; Vartuli, C. B. ; Lothian, J. R. ; Flemish, J. R.
Pub. info.: Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.251-,  1996.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 421
3.

Conference Proceedings
Conference Proceedings
3. OPTICAL PROPERTIES OF THERMALLY OXIDIZED SILICON
Russo, O. L. ; Ravindra, N. M. ; Grow, J. M. ; Dumas, K. A.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.319-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
4.

Conference Proceedings
Conference Proceedings
4. PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON NITRIDE FROM NOVEL ORGANOSILANES
Grow, J. M. ; Levy, R. A. ; Yu, Y. ; Shih, K. T.
Pub. info.: Materials and processes for environmental protection : symposium held April 5-7, 1994, San Francisco, California, U.S.A..  pp.241-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 344
5.

Conference Proceedings
Conference Proceedings
5. Low Bias Dry Etching of SiC and SiCN in ICP NF3 Discharges
Wang, J. J. ; Cho, Hyun ; Lambers, E. S. ; Pearton, S. J. ; Ostling, M. ; Zetterling, C-M. ; Grow, J. M. ; Ren, F. ; Shul, R. J. ; Han, J.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.507-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
6.

Conference Proceedings
Conference Proceedings
6. Intermolecular Magnetic Exchange Interactions in Molecular Crystals
Grow, J. M. ; Wickman, H. H.
Pub. info.: Extended interactions between metal ions in transition metal complexes : a symposium sponsored by the Division of Inorganic Chemistry at the 167th meeting of the American Chemical Society, Los Angeles, Calif., April 3-5, 1974.  pp.34-,  1974.  Washington.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 5