1.

Conference Proceedings

Conference Proceedings
Harame, D. ; Subbanna, S. ; Dunn, J. ; St Onge, S.A. ; Freeman, G. ; Malinowski, J. ; Groves, R. ; Joseph, A. ; Ahlgren, D. ; Johnson, R. ; Zierak, M. ; Coolbaugh, D.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.143-146,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Technical Paper

Technical Paper
Scheeringa, K. ; Schwerin, D. ; Groves, R. ; Zhou, C.Q. ; Cantwell, J.M.R.
Pub. info.: AIAA paper.  2002.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME Joint Thermophysics and Heat Transfer Conference
Ser. no.: 2002
3.

Conference Proceedings

Conference Proceedings
Vaed, K. ; Graham, W. ; Steen, M. ; Park, J.-E. ; Groves, R. ; Volant, R. ; Nunes, R. ; Vichiconti, J. ; Stein, K. ; Ahlgren, D.
Pub. info.: Micromachining and Microfabrication Process Technology IX.  pp.74-85,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5342