1.

Conference Proceedings
Conference Proceedings
1. Advanced x-ray mask inspection system (AXIS) using scanning electron microscopy for sub-70-nm die-to-database inspections [6152-83]
Boerger, B. E. ; Yu, M. ; Selzer, R. A. ; Ma, Y. ; Ronning, D. ; Ducharme, D. ; Grenon, B. J. ; Trybendis, M. J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. An ultra-uniform ultra-thin resist deposition process [6349-07]
Picard, G. ; Schneider, J. ; Grenon, B. J.
Pub. info.: Photomask Technology 2006.  pp.634907-634908,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
3.

Conference Proceedings
Conference Proceedings
3. Advanced photomask cleaning
Marmillion, P. ; Trybula, W. ; Grenon, B. J.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.506-510,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
4.

Conference Proceedings
Conference Proceedings
4. Evaluation of printability of crystal growth defects in a 193-nm lithography environment using AIMS
Schmid, R. ; Zibold, A. M. ; Bhattacharyya, K. ; Chen, X. ; Grenon, B. J.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.1035-1043,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567