1.

Conference Proceedings
Conference Proceedings
1. SEM voltage contrast simulations
Grella,L. ; Marcus,M. ; Lorusso,G. ; Adler,D.L.
Pub. info.: Charged particle optics IV : 22-23 July 1999, Denver, Colorado.  pp.133-141,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3777
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of 0.15 ｦﾌm SOIp-MOSFETs using Synchrotron Radiation X-ray Lithography,
Choi,S.S. ; Jeon,Y.J. ; Lyu,J.-S. ; Yoo,H.J. ; Fabrizio,E.D. ; Grella,L. ; Gentili,M.
Pub. info.: Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea.  Part1  pp.15-16,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2778
3.

Conference Proceedings
Conference Proceedings
3. Three-dimensional simulations of SEM imaging and charging
Grella,L. ; Lorusso,G. ; Niemi,T. ; Chuang,T.C. ; Adler,D.L.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.267-273,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344