1.

Conference Proceedings
Conference Proceedings
1. Narrow-band EUV multilayer coating for the MOSES sounding rocket [5900-03]
Owens, S. M. ; Gum, J. S. ; Tarrio, C. ; Grantham, S. ; Dvorak, J. ; Kjornrattanawanich, B. ; Keski-Kuha, R. ; Thomas, R. J. ; Konkelborg, C. C.
Pub. info.: Optics for EUV, x-ray, and gamma-ray astronomy II : 3-4 August 2005, San Diego, California, USA.  pp.590003-590003,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5900
2.

Conference Proceedings
Conference Proceedings
2. PHOTOEMISSION MEASUREMENTS OF PHOTOCATHODE MATERIALS IN THE 115-400 A RANGE
Grantham, S. ; Richardson, M. C. ; Watts, R. ; Lucatorto, T. ; Tarrio, C. ; Pollack, F.
Pub. info.: Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A..  pp.181-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 306
3.

Conference Proceedings
Conference Proceedings
3. Vibration non-sensitive lithographic system for writing individualized holograms for data storage and security applications
Grantham, S. ; Hill, S. B. ; Tarrio, C. ; Vest, R. E. ; Lucatorto, T. B.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.619-628,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
4.

Conference Proceedings
Conference Proceedings
4. EUV testing of multilayer mirrors: critical issues [6151-15]
Hill, S. B. ; Ermanoski, I. ; Grantham, S. ; Tarrio, C. ; Lucatorto, T. B. ; Madey, T. E. ; Bajt, S. ; Chandhok, M. ; Yan, P. ; Wood, O. ; Wurm, S. ; Edwards, N. V.
Pub. info.: Emerging Lithographic Technologies X.  pp.61510F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
5.

Conference Proceedings
Conference Proceedings
5. Design and performance of capping layers for EUV multilayer mirrors
Bajt, S. ; Chapman, H.N. ; Nguyen, N. ; Alameda, J.B. ; Robinson, J.C. ; Malinowski, M.E. ; Gullikson, E. ; Aquila, A. ; Tarrio, C. ; Grantham, S.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.236-248,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
6.

Conference Proceedings
Conference Proceedings
6. First results from the updated NIST/DARPA EUV reflectometry facility
Grantham, S. ; Tarrio, C. ; Squires, M.B. ; Lucatorto, T.B.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.348-353,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
7.

Conference Proceedings
Conference Proceedings
7. Scaling studies of capping layer oxidation by water exposure with EUV radiation and electrons
Clift, W.M. ; Klebanoff, L.E. ; Tarrio, C. ; Grantham, S. ; Wood, O.R., II ; Wurm, S. ; Edwards, N.V.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.666-674,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374