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Conference Proceedings

1. A COMPARISON ON IN-SITU VAPOR/GAS PHASE CLEANING WITH CONVENTIONAL RCA BASED WET CLEANING

Grant, J. M.

Pub. info.:	Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.313-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	342

Conference Proceedings

2. ULTRATHIN GATE DIELECTRICS GROWN IN MIXTURES OF N20 AND O2 USING RAPID THERMAL OXIDATION

Grant, J. M. ; Hsieh, T-Y.

Pub. info.:	Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.163-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	342