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10 results

Conference Proceedings

1. Development and characterization of advanced F2 laser source for 157-nm lithography (Abstract Only)

Vogler,K. ; Voss,F. ; Bergmann,E. ; Stamm,U. ; Govorkov,S.V. ; Hua,G. ; Walecki,W.J.

Pub. info.:	Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado. pp.444-444, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4347

Conference Proceedings

2. High-accuracy microdrilling of steel with solid state UV laser at a rate of 10 mm/sec

Govorkov,S.V. ; Slobodtchikov,E.V. ; Wiessner,A.O. ; Basting,D.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA. pp.365-370, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3933

Conference Proceedings

3. Fiber Bragg grating writing by interferometric or phase mask methods using high-power excimer lasers

Mayer,E.E. ; Gillett,D.A. ; Govorkov,S.V.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California. pp.152-160, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3618

Conference Proceedings

4. Excimer laser for 157-nm lithography

Stamm,U. ; Bragin,I. ; Govorkov,S.V. ; Kleinschmidt,J. ; Patzel,R. ; Slobodtchikov,E. ; Vogler,K. ; F.Voｦﾂ ; Basting,D.

Pub. info.:	Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part2 pp.816-826, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3676

Conference Proceedings

5. High-throughput micromachining of steel and ceramics with solid state UV laser

Govorkov,S.V. ; Slobodchikov,E.V. ; Wiessner,A.O. ; Basting,D.

Pub. info.:	High-power laser ablation III, 24-28 April 2000, Santa Fe, USA. pp.790-800, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4065

Conference Proceedings

6. Advanced F2 lasers for microlithography

Vogler,K. ; Stamm,U. ; Bragin,I. ; Voss,F. ; Govorkov,S.V. ; Hua,G. ; Kleinschmidt,J. ; Patzel,R.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.1515-1528, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Conference Proceedings

7. Novel results of laser precision microfabrication with excimer lasers and solid state lasers

Stamm,U. ; Fiebig,M. ; Govorkov,S.V. ; Mayer,E.E. ; Osmanov,R. ; Scaggs,M.J. ; Slobodchikov,E.V. ; Wiessner,A.O. ; Basting,D.

Pub. info.:	First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan. pp.118-123, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4088

Conference Proceedings

8. Novel techniques for microscopic imaging of semiconductor surfaces

Yakovlev,V.V. ; Mikhaylichenko,K. ; Govorkov,S.V.

Pub. info.:	Commercial and biomedical applications of ultrashort pulse lasers; laser plasma generation and diagnostics : 23 January, 2001, San Jose, [California] USA. pp.17-24, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4276

Conference Proceedings

9. Advanced F2 lasers for 157-nm lithography

Vogler,K. ; Klaft,I. ; Voss,F. ; Bragin,I. ; Bergmann,E. ; Nagy,T. ; Niemoeller,N. ; Paetzel,R. ; Govorkov,S.V. ; Hua,G.

Pub. info.:	Optical Microlithography XIV. 4346 pp.1175-1182, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

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Conference Proceedings

10. DUV laser light sources

Govorkov,S.V. ; Willard,R.

Pub. info.:	Laser-Induced Damage in Optical Materials: 1998. pp.43-44, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3578

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Author: Govorkov,S.V.