1.

Conference Proceedings

Conference Proceedings
Li,M.J. ; Allen,C.A. ; Gordon,S.A. ; Kuhn,J.L. ; Mott,D.B. ; Stahle,C.K. ; Wang,L.L.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.422-431,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings

Conference Proceedings
Li,M.J. ; Allen,C.A. ; Aslam,S. ; Chen,T.C. ; Finkbeiner,F.M. ; Gordon,S.A. ; Kuhn,J.L. ; Mott,D.B. ; Stahle,C.M. ; Stahle,C.K. ; Tralshawala,N. ; Wang,L.L.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.192-203,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892