Draper, C.W. ; Anyanwu, V.E. ; Eisenberg, J.H. ; Felton, G.J. ; Roy, P.K. ; Chittipeddi, S. ; Bechtold, P.F. ; Hagner, G. ; Cooper, D. ; Syverson, D. ; Witowski, B. ; Van Eck, B. ; Gordon, M.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.392-400, 1994. Pennington, NJ. Electrochemical Society
Korol, R.M. ; Togonu-Bickersteth, B. ; Yang, V.X. ; Dimov, S. ; Vatsya, P. ; Gordon, M. ; Vitkin, A. ; Liu, L. ; Canham, P. ; Clarke, S. ; Lucas, A.
Pub. info.:
Optical coherence tomography and coherence techniques : 22-24 June 2003, Munich, Germany. pp.212-220, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering