Lu, P. -H. ; Mehtsun, S. ; Sagan, J. P. ; Shan, J. ; Gonzalez, E. ; Ding, S. ; Khanna, D. N.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.1235-1245, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ding, S. ; Sagan, J. P. ; Shan, J. ; Gonzalez, E. ; Dixit, S. S. ; Liu, Y. ; Khanna, D. N.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.1023-1033, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Wu, H. ; Xiang, Z. ; Gonzalez, E. ; Shan, J. ; Ding, S. ; Kang, W.-B. ; Hishida, A.
Pub. info.:
Advances in Resist Technology and Processing XIX. Part Two pp.1112-1118, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Xiang, Z. ; Shan, J. ; Gonzalez, E. ; Wu, H. ; Ding, S. ; Neisser, M. ; Ho, B.-C. ; Chen, H.
Pub. info.:
Advances in Resist Technology and Processing XIX. Part Two pp.1102-1111, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering