1.

Conference Proceedings
Conference Proceedings
1. Scanned e-beam annealing of MOS devices
Speight, J.D. ; Glaccum, A.E. ; Machin, D. ; McMahon, R.A. ; Ahmed, H.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.383-390,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1
2.

Conference Proceedings
Conference Proceedings
2. Optimised multi-scan e-beam annealing of MOS devices
Pollard, C.J. ; Glaccum, A.E. ; Seight, J.D.
Pub. info.: Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.789-794,  1982.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 4